Chemistry in Microelectronics

Chemical. Fluids. in. Microelectronics. 4.1. Ultrapure. water. Semiconductor
device manufacturing consumes large amounts of water, particularly ultrapure
water (UPW). UPW is widely employed in the many cleaning sequences that
represent ...

Author: Yannick Le Tiec

Publisher: John Wiley & Sons

ISBN: 9781118578124

Category: Technology & Engineering

Page: 384

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Microelectronics is a complex world where many sciences need to collaborate to create nano-objects: we need expertise in electronics, microelectronics, physics, optics and mechanics also crossing into chemistry, electrochemistry, as well as biology, biochemistry and medicine. Chemistry is involved in many fields from materials, chemicals, gases, liquids or salts, the basics of reactions and equilibrium, to the optimized cleaning of surfaces and selective etching of specific layers. In addition, over recent decades, the size of the transistors has been drastically reduced while the functionality of circuits has increased. This book consists of five chapters covering the chemicals and sequences used in processing, from cleaning to etching, the role and impact of their purity, along with the materials used in “Front End Of the Line” which corresponds to the heart and performance of individual transistors, then moving on to the “Back End Of the Line” which is related to the interconnection of all the transistors. Finally, the need for specific functionalization also requires key knowledge on surface treatments and chemical management to allow new applications. Contents 1. Chemistry in the “Front End of the Line” (FEOL): Deposits, Gate Stacks, Epitaxy and Contacts, François Martin, Jean-Michel Hartmann, Véronique Carron and Yannick Le Tiec. 2. Chemistry in Interconnects, Vincent Jousseaume, Paul-Henri Haumesser, Carole Pernel, Jeffery Butterbaugh, Sylvain Maîtrejean and Didier Louis. 3. The Chemistry of Wet Surface Preparation: Cleaning, Etching and Drying, Yannick Le Tiec and Martin Knotter. 4. The Use and Management of Chemical Fluids in Microelectronics, Christiane Gottschalk, Kevin Mclaughlin, Julie Cren, Catherine Peyne and Patrick Valenti. 5. Surface Functionalization for Micro- and Nanosystems: Application to Biosensors, Antoine Hoang, Gilles Marchand, Guillaume Nonglaton, Isabelle Texier-Nogues and Francoise Vinet. About the Authors Yannick Le Tiec is a technical expert at CEA-Leti, Minatec since 2002. He is a CEA-Leti assignee at IBM, Albany (NY) to develop the advanced 14 nm CMOS node and the FDSOI technology. He held different technical positions from the advanced 300 mm SOI CMOS pilot line to different assignments within SOITEC for advanced wafer development and later within INES to optimize solar cell ramp-up and yield. He has been part of the ITRS Front End technical working group at ITRS since 2008.
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Microelectronics Processing

This is the first book of its kind to tie fundamental engineering concepts to solid state process technology.

Author: Dennis W. Hess

Publisher: Amer Chemical Society

ISBN: UOM:39015046004340

Category: Science

Page: 547

View: 482

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Although chemical engineering principles are at the heart of solid state process technology, until now no reference volume addressing this relationship was available. This is the first book of its kind to tie fundamental engineering concepts to solid state process technology. Discussing the basic concepts involved--liquid-phase epitaxy, physical and chemical vapor deposition, diffusion and oxidation in silicon, resists in microlithography, etc.--this volume will be particularly useful in chemical engineering courses. It offers a framework within which specialized courses in microelectronics processing can be organized. In addition, it serves as a valuable reference source for all industrial engineers working with the individual process steps covered.
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Electronic Material Science and Surfaces Interfaces and Thin Films for Microelectronics

This set, consisting of Surfaces, Interfaces, and Films for Microelectronics and Electronic Materials Science by Eugene Irene introduces the reader to the field of materials science, providing extensive coverage of surfaces, interfaces and ...

Author: Eugene A. Irene

Publisher: Wiley-Interscience

ISBN: 0470224789

Category: Science

Page: 700

View: 902

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Materials Science is predicated on the understanding of why materials behave in the way that they do. This set, consisting of Surfaces, Interfaces, and Films for Microelectronics and Electronic Materials Science by Eugene Irene introduces the reader to the field of materials science, providing extensive coverage of surfaces, interfaces and film fundamentals for microelectronics, as well as the physics and chemistry of microelectronics processing. Such information is designed to provide a basis for the understanding of existing microelectronic applications as well as to inform the design of new ones. Written by an expert with more than 25 years teaching experience in this field, this readily accessible set is appropriate as a primary text for undergraduate and graduate students and will also serve as a valuable resource to professionals who require self-study.
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Microelectronics Processing

Examines leading-edge developments in the field of materials development.

Author: L. A. Casper

Publisher: Amer Chemical Society

ISBN: UOM:39015009821961

Category: Language Arts & Disciplines

Page: 443

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Examines leading-edge developments in the field of materials development. Covers all major aspects of materials science, with applications to many high technology areas. Explores the role of chemistry in high-tech materials and their applications.
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Chemical Mechanical Planarization of Microelectronic Materials

Chemical Mechanical Planarization of Microelectronic Materials provides engineers and scientists working in the microelectronics industry with unified coverage of both the fundamental mechanisms and engineering applications of CMP.

Author: Joseph M. Steigerwald

Publisher: John Wiley & Sons

ISBN: 9783527617753

Category: Science

Page: 337

View: 413

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Chemical Mechanical Planarization (CMP) plays an important role in today's microelectronics industry. With its ability to achieve global planarization, its universality (material insensitivity), its applicability to multimaterial surfaces, and its relative cost-effectiveness, CMP is the ideal planarizing medium for the interlayered dielectrics and metal films used in silicon integrated circuit fabrication. But although the past decade has seen unprecedented research and development into CMP, there has been no single-source reference to this rapidly emerging technology-until now. Chemical Mechanical Planarization of Microelectronic Materials provides engineers and scientists working in the microelectronics industry with unified coverage of both the fundamental mechanisms and engineering applications of CMP. Authors Steigerwald, Murarka, and Gutmann-all leading CMP pioneers-provide a historical overview of CMP, explain the various chemical and mechanical concepts involved, describe CMP materials and processes, review the latest scientific data on CMP worldwide, and offer examples of its uses in the microelectronics industry. They provide detailed coverage of the CMP of various materials used in the making of microcircuitry: tungsten, aluminum, copper, polysilicon, and various dielectric materials, including polymers. The concluding chapter describes post-CMP cleaning techniques, and most chapters feature problem sets to assist readers in developing a more practical understanding of CMP. The only comprehensive reference to one of the fastest growing integrated circuit manufacturing technologies, Chemical Mechanical Planarization of Microelectronic Materials is an important resource for research scientists and engineers working in the microelectronics industry. An indispensable resource for scientists and engineers working in the microelectronics industry Chemical Mechanical Planarization of Microelectronic Materials is the only comprehensive single-source reference to one of the fastest growing integrated circuit manufacturing technologies. It provides engineers and scientists who work in the microelectronics industry with unified coverage of both the fundamental mechanisms and engineering applications of CMP, including: * The history of CMP * Chemical and mechanical underpinnings of CMP * CMP materials and processes * Applications of CMP in the microelectronics industry * The CMP of tungsten, aluminum, copper, polysilicon, and various dielectrics, including polymers used in integrated circuit fabrication * Post-CMP cleaning techniques * Chapter-end problem sets are also included to assist readers in developing a practical understanding of CMP.
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Microelectronic Applications of Chemical Mechanical Planarization

After a detailed overview of the fundamentals and basic science of CMP, Microelectronic Applications of Chemical Mechanical Planarization: * Provides in-depth coverage of a wide range of state-of-the-art technologies and applications * ...

Author: Yuzhuo Li

Publisher: John Wiley & Sons

ISBN: 0470180897

Category: Technology & Engineering

Page: 760

View: 994

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An authoritative, systematic, and comprehensive description of current CMP technology Chemical Mechanical Planarization (CMP) provides the greatest degree of planarization of any known technique. The current standard for integrated circuit (IC) planarization, CMP is playing an increasingly important role in other related applications such as microelectromechanical systems (MEMS) and computer hard drive manufacturing. This reference focuses on the chemical aspects of the technology and includes contributions from the foremost experts on specific applications. After a detailed overview of the fundamentals and basic science of CMP, Microelectronic Applications of Chemical Mechanical Planarization: * Provides in-depth coverage of a wide range of state-of-the-art technologies and applications * Presents information on new designs, capabilities, and emerging technologies, including topics like CMP with nanomaterials and 3D chips * Discusses different types of CMP tools, pads for IC CMP, modeling, and the applicability of tribometrology to various aspects of CMP * Covers nanotopography, CMP performance and defect profiles, CMP waste treatment, and the chemistry and colloidal properties of the slurries used in CMP * Provides a perspective on the opportunities and challenges of the next fifteen years Complete with case studies, this is a valuable, hands-on resource for professionals, including process engineers, equipment engineers, formulation chemists, IC manufacturers, and others. With systematic organization and questions at the end of each chapter to facilitate learning, it is an ideal introduction to CMP and an excellent text for students in advanced graduate courses that cover CMP or related semiconductor manufacturing processes.
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Microsystem Technology in Chemistry and Life Sciences

Authors have been carefully chosen to guarantee for the quality of the contents. An engineer, a chemist or a biologist will find new impulses from the various chapters in this book.

Author: Andreas Manz

Publisher: Springer Science & Business Media

ISBN: 9783540695448

Category: Science

Page: 253

View: 220

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"WHAT DOES NOT NEED TO BE BIG, WILL BE SMALL", a word by an engineer at a recent conference on chips technology. This sentence is particularly true for chemistry. Microfabrication technology emerged from microelectronics into areas like mechanics and now chemistry and biology. The engineering of micron and submicron sized features on the surface of silicon, glass and polymers opens a whole new world. Micromotors smaller than human hair have been fabricated and they work fine. It is the declared goal of the authors to bring these different worlds together in this volume. Authors have been carefully chosen to guarantee for the quality of the contents. An engineer, a chemist or a biologist will find new impulses from the various chapters in this book.
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Infrared Characterization for Microelectronics

Most of the books on infrared characterization are for applications in chemistry and no book has been dedicated to infrared characterization for microelectronics.

Author: W. S. Lau

Publisher: World Scientific

ISBN: 9810223528

Category: Technology & Engineering

Page: 160

View: 848

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Most of the books on infrared characterization are for applications in chemistry and no book has been dedicated to infrared characterization for microelectronics. The focus of the book will be on practical applications useful to the production line and to the research and development of microelectronics. The background knowledge and significance of doing a particular type of infrared measurement will be discussed in detail. The principal purpose of the book is to serve as a useful handbook for practising engineers and scientists in the field of microelectronics.
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Biosensors

The book clearly explains microelectronic techniques used to produce these cheap, fast reacting, and disposable sensors with the aid of helpful diagrams and tables.

Author: M Lambrechts

Publisher: CRC Press

ISBN: 0750301120

Category: Science

Page: 316

View: 523

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Biosensors are analytical devices that combine a biologically sensitive element with a physical or chemical transducer to selectively and quantitatively detect the presence of specific compounds. Balancing basics, principles, and case studies, Biosensors: Microelectrochemical Devices covers the theory and applications of one class of biosensor-microelectrochemical devices. The book clearly explains microelectronic techniques used to produce these cheap, fast reacting, and disposable sensors with the aid of helpful diagrams and tables. Researchers and postgraduates active in the field of chemical sensors, analytical chemistry, or microelectronics will find this an invaluable reference.
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Microelectronic Materials

This practical book shows how an understanding of structure, thermodynamics, and electrical properties can explain some of the choices of materials used in microelectronics, and can assist in the design of new materials for specific ...

Author: C.R.M. Grovenor

Publisher: Routledge

ISBN: 9781351431538

Category: Science

Page: 544

View: 381

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This practical book shows how an understanding of structure, thermodynamics, and electrical properties can explain some of the choices of materials used in microelectronics, and can assist in the design of new materials for specific applications. It emphasizes the importance of the phase chemistry of semiconductor and metal systems for ensuring the long-term stability of new devices. The book discusses single-crystal and polycrystalline silicon, aluminium- and gold-based metallisation schemes, packaging semiconductor devices, failure analysis, and the suitability of various materials for optoelectronic devices and solar cells. It has been designed for senior undergraduates, graduates, and researchers in physics, electronic engineering, and materials science.
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Ion Radical Organic Chemistry

8.2 ORGANIC ION-RADICALS IN MICROELECTRONICS The creation of new
systems to record, store, and reorganize ... Ion-radical organic chemistry can
propose such basic materials satisfying microelectronic strategy, as exemplified
by the ...

Author: Zory Vlad Todres

Publisher: CRC Press

ISBN: 1420008390

Category: Science

Page: 496

View: 667

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Consolidating knowledge from a number of disciplines, Ion-Radical Organic Chemistry: Principles and Applications, Second Edition presents the recent changes that have occurred in the field since the publication of the first edition in 2003. This volume examines the formation, transformation, and application of ion-radicals in typical conditions of organic synthesis. Avoiding complex mathematics, the author explains the principles of ion-radical organic chemistry and presents an overview of organic ion-radical reactions. He reviews methods of determining ion-radical mechanisms and controlling ion-radical reactions. Wherever applicable, the text addresses issues relating to ecology and biomedical concerns as well as inorganic participants of the ion-radical organic reactions. After reviewing the nature of organic ion-radicals and their ground-state electronic structure, the book discusses their formation, the relationship between electronic structure and reactivity, mechanism and regulation of reactions, stereochemical aspects, synthetic opportunities, and practical applications. Additional topics include electronic and opto-electronic devices, organic magnets and conductors, lubricants, other materials, and reactions of industrial or biomedical importance. The book concludes by providing an outlook on possible future development in this field. Researchers and practitioners engaged in active work on synthetic or mechanistic organic chemistry and its practical applications will find this text to be invaluable in both its scope and its depth.
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Modern Trends in Chemistry and Chemical Engineering

These electrically conductive polymers have increasing number of applications in
different areas of microelectronics and chemical analysis [1].Conductive
polymers have л-conjugated structure, which can conduct electricity in doped
form.

Author: A. K. Haghi

Publisher: CRC Press

ISBN: 9781926895000

Category: Science

Page: 167

View: 611

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This book covers a collection of topics that reflect the diversity of modern trends in chemistry and chemical engineering. It presents leading-edge research from some of the brightest and most well known scientists from around the world. Contributions range from new methods to novel applications of existing methods to give readers an understanding of the material and/or structural behavior of new and advanced systems. The book offers a broad scope of new research for academics, researchers, and engineering professionals, which has potential for applications in several disciplines of engineering and science. Topics include: Time evolution of the electronegativity and its various scales and the interrelationship between electronegativity and other periodic parameters The starch nanocomposite and nanoparticles and its biomedical applications The lamination of nanofiber at different temperatures Electrospinning of chitosan (CHT) and how it can be improved by the addition of synthetic materials including carbon nanotubes (CNTs) Smart nanofibers based on nylon 6,6/polyethylene glycol blend Nano-biocomposites with chitosan matrix and carbon nanotubes (CNTs) Polypyrrole-coated polyacrylonitrile electrospun nanofibers Semi-empirical AM-1 studies on porphyrin, which include global reactivity parameters, local reactivity parameters, and atomic charge
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Handbook of Computational Intelligence in Manufacturing and Production Management

EC in Chemical Engineering High-powered, ultra short pulses of laser energy
can split apart complex molecules into simpler molecules, a process with
important applications to organic chemistry and microelectronics. The specific
end ...

Author: Laha, Dipak

Publisher: IGI Global

ISBN: 9781599045849

Category: Computers

Page: 516

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During the last two decades, computer and information technologies have forced great changes in the ways businesses manage operations in meeting the desired quality of products and services, customer demands, competition, and other challenges. The Handbook of Computational Intelligence in Manufacturing and Production Management focuses on new developments in computational intelligence in areas such as forecasting, scheduling, production planning, inventory control, and aggregate planning, among others. This comprehensive collection of research provides cutting-edge knowledge on information technology developments for both researchers and professionals in fields such as operations and production management, Web engineering, artificial intelligence, and information resources management.
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Nanomaterials

One major achievement has been the modification of consisting methodologies
derived from chemistry or microelectronics (e.g., electroless plating) as well as
the development of new pathways to make them compatible with the relatively ...

Author: Charles M. Lukehart

Publisher: John Wiley & Sons

ISBN: 9781118625224

Category: Technology & Engineering

Page: 936

View: 921

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Connecting inorganic chemistry to the hottest topic in materials science, this timely resource collects the contributions made by leading inorganic chemists towards nanomaterials research. The second volume in the “Wiley Encyclopedia of Inorganic Chemistry Methods and Applications Series,” this signature title concentrates on recent developments in the field and includes all key topics such as nanowires, nanotubes, biomineralization, supramolecular materials and much more. This volume is also available as part of Encyclopedia of Inorganic Chemistry, 5 Volume Set. This set combines all volumes published as EIC Books from 2007 to 2010, representing areas of key developments in the field of inorganic chemistry published in the Encyclopedia of Inorganic Chemistry. Find out more.
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Adhesion in Microelectronics

There is a large difference in the resulting interface chemistry if elemental
aluminium is deposited onto the modified polyolefin ... Figure 3.21 Schematics of
Alpolyolefin and polyolefinAl systems An usual method to form chemical bonds to
 ...

Author: K. L. Mittal

Publisher: John Wiley & Sons

ISBN: 9781118831342

Category: Technology & Engineering

Page: 368

View: 574

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This comprehensive book will provide both fundamental andapplied aspects of adhesion pertaining to microelectronics in asingle and easily accessible source. Among the topics to be coveredinclude; Various theories or mechanisms of adhesion Surface (physical or chemical) characterization of materials asit pertains to adhesion Surface cleaning as it pertains to adhesion Ways to improve adhesion Unraveling of interfacial interactions using an array ofpertinent techniques Characterization of interfaces / interphases Polymer-polymer adhesion Metal-polymer adhesion (metallized polymers) Polymer adhesion to various substrates Adhesion of thin films Adhesion of underfills Adhesion of molding compounds Adhesion of different dielectric materials Delamination and reliability issues in packaged devices Interface mechanics and crack propagation Adhesion measurement of thin films and coatings
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Fundamental Gas phase and Surface Chemistry of Vapor phase Deposition II and Process Control Diagnostics and Modeling in Semiconductor Manufacturing IV

... Xuegeng Li , and Mark T . Swihart Department of Chemical Engineering ,
University at Buffalo ( SUNY ) Buffalo , NY 14260 - 4200 ABSTRACT Particulate
contamination is the leading source of yield loss in microelectronics
manufacturing .

Author: M. Meyyapan

Publisher: The Electrochemical Society

ISBN: 1566773199

Category: Chemical vapor deposition

Page: 508

View: 323

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Microelectronics Technology

Provides an up-to-date assessment of chemically amplified resist materials chemistry and process considerations.

Author: Elsa Reichmanis

Publisher: Amer Chemical Society

ISBN: UOM:39015031856449

Category: Technology & Engineering

Page: 563

View: 937

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Provides an up-to-date assessment of chemically amplified resist materials chemistry and process considerations. Reports novel chemistry for single layer 193nm lithographic applications. Discusses new approaches to silicon-containing resists and multilevel processes. Explores the design of low-dielectric polymer materials for microelectronic applications.
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The Social and Economic Impact of New Technology 1978 84 A Select Bibliography

5.2(20) MICROELECTRONICS AND MANUFACTURING INDUSTRY Bessant, J.
Microprocessors and Microsystems (UK), ... OF MICROELECTRONICS INTO THE
CHEMICAL INDUSTRY Bessant, J. Chemistry and Industry (UK), 4 Sep 1982, ...

Author: Leslie Grayson

Publisher: Springer Science & Business Media

ISBN: 9781468482584

Category: Juvenile Nonfiction

Page:

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Silicon chip technology; microprocessor technology; information technology; or quite simply new technology. These are some of the names representing the microelectronics revolution depending upon the audience being addressed by speaker or writer. No previous new industrial development has caused such widespread publicity and discussion amongst users and researchers as the new technology. Concern is being expressed about the effects of new technology on employment, job satisfaction, social life, leisure activities and the economics of commerce and industry. The late 70s saw many doom-laden predictions of those effects but by 1983 both management and trade unions were taking a more objective view of the social and economic impacts, and many correspondents now see the new technology as a means of opening up new industries and overcoming the effects of world recessions. The "chip" has involved the factory floor, the office, the supermarket and the home. Electronic funds transfer, electronic shopping, microelectronic domestic appliances, word processors and microprocessor-controlled machinery mean that the new technology has pervaded all aspects of social and economic life, and the developed countries are now coming to accept it as part of society as a whole. Inevitably the flood of literature on the social and economic impacts of new technology has been overwhelming. Unfortunately the quality of information and arguments propagated at conferences, in journal papers and research reports has indicated that there has been little quantifiable evidence available on the effects of these impacts.
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Nanotechnology and Microelectronics Global Diffusion Economics and Policy

Author of two books on microelectronics and electrochemistry, he co-invented a
microchip used in robotics. ... In the area of International grants, he has won a
Research grant from the Royal Society of Chemistry of Great Britain (2002); a
grant ...

Author: Ekekwe, Ndubuisi

Publisher: IGI Global

ISBN: 9781616920074

Category: Technology & Engineering

Page: 538

View: 156

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"This book assesses the state of nanotechnology and microelectronics, and examines many issues, such as climate change, trade, innovation, diffusion, etc, with a theme focused on facilitating the structures for the adoption and penetration of the technologies into developing nations"--Provided by publisher.
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Dry Etching for Microelectronics

Over the last decade, dry or plasma-assisted etching has emerged as an
indispensable tool for the manufacture of microelectronic circuits, replacing
traditional wet chemistry for etching and pattern transfer. The present volume
collects ...

Author: R.A. Powell

Publisher: Elsevier

ISBN: 9780080983585

Category: Technology & Engineering

Page: 312

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This volume collects together for the first time a series of in-depth, critical reviews of important topics in dry etching, such as dry processing of III-V compound semiconductors, dry etching of refractory metal silicides and dry etching aluminium and aluminium alloys. This topical format provides the reader with more specialised information and references than found in a general review article. In addition, it presents a broad perspective which would otherwise have to be gained by reading a large number of individual research papers. An additional important and unique feature of this book is the inclusion of an extensive literature review of dry processing, compiled by search of computerized data bases. A subject index allows ready access to the key points raised in each of the chapters.
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