Silicon Nitride Silicon Dioxide and Emerging Dielectrics 10

FIB/SEM images of the GaAs HBT area with (a) 0.4 μm, (b) 0.5 μm, and (c) 0.6 μm of PECVD Si3N4 as interlevel dielectric, with 1 μm thick Metal 1. Figure 4. FIB/SEM images of Metal 2 on top of Metal 1 interconnection structures, ...

Author: R. Ekwal Sah

Publisher: The Electrochemical Society

ISBN: 9781566777100

Category: Dielectric films

Page: 871

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The issue of ECS Transactions contains papers presented at the Tenth International Symposium on Silicon Nitride, Silicon Dioxide, and Alternate Emerging Dielectrics held in San Francisco on May 24-29, 2009. The papers address a very wide range of fabrication and characterization techniques, and applications of thin dielectric films in microelectronic and optoelectronic devices. More specific topics addressed by the papers include reliability, interface states, gate oxides, passivation, and dielctric breakdown.
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Official Gazette of the United States Patent and Trademark Office

438439 1 Claim 70 20 74 140 140 120 100 319 520 529 310 520 529 100 102 104 106 319 A method of isolating devices ... a pad oxide layer over a monocrystalline silicon substrate ; providing a silicon nitride layer over the pad oxide ...

Author:

Publisher:

ISBN: PSU:000066183037

Category: Patents

Page: 1402

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High Temperature Corrosion of Technical Ceramics

The " elbow " shaped area in fact is the silicon nitride phase field at 1 atm of nitrogen pressure . This phase field will shrink or expand with decreasing or increasing nitrogen pressure . As the figure indicates , if log PN , is less ...

Author: R.J. Fordham

Publisher: Springer Science & Business Media

ISBN: 1851665684

Category: Technology & Engineering

Page: 244

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ERDA Energy Research Abstracts

... 1 : 22319 Codeposited pyrocarbon - silicon carbide coatings for nuclear fuel particles , 1 : 11108 SILICON CARBIDES / MECHANICAL PROPERTIES Tensile and bend strengths of silicon nitride and hot - pressed silicon carbide , 1 : 3480 ...

Author: United States. Energy Research and Development Administration

Publisher:

ISBN: UOM:39015026174493

Category: Medicine

Page: 602

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Advanced Processing and Manufacturing Technologies for Structural and Multifunctional Materials V

Strength of the joined silicon nitride was 110 MPa, therefore, good joining was achieved by microwave local heating. INTRODUCTION Joining technology is critically important for fabricating ceramic components. Silicon nitrides are one of ...

Author: Tatsuki Ohji

Publisher: John Wiley & Sons

ISBN: 9781118172704

Category: Technology & Engineering

Page: 220

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This book is a collection of papers from The American Ceramic Society's 35th International Conference on Advanced Ceramics and Composites, held in Daytona Beach, Florida, January 23-28, 2011. This issue includes papers presented in the 5th International Symposium on Advanced Processing and Manufacturing Technologies for Structural and Multifunctional Materials and Systems on topics such as Design-Oriented Manufacturing and Novel Forming and Sintering. Papers from a special session held in honor of Katsutoshi Komeya of Yokohama National University, Japan are also included.
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Wear of Materials

SCIENCE IRECTO WEAR ELSEVIER www.elsevier.com/locate/wear b Abstract Keywords : Erosion ; Silicon nitride ; Impact angle ; Unidirectionally oriented 1. Introduction is much greater than that in a perpendicular direction [ 9 ] .

Author: P Blau

Publisher: Elsevier

ISBN: 008044301X

Category: Reference

Page: 1540

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The 14th International Conference on Wear of Materials took place in Washington, DC, USA, 30 March - 3 April 2003. These proceedings contain over two-hundred peer reviewed papers containing the best research, technical developments and engineering case studies from around the world. Biomaterials and nano-tribology receive special attention in this collection reflecting the general trends in the field. Further highlights include a focus on the new generation of instrumentation to probe wear at increasingly small scales. Approximately ninety communications and case studies, a popular format for the academic community have also been included, enabling the inclusion of the most up-to-date research. Over 200 peer-reviewed papers including hot topics such as biomaterials and nano-tribology Keeping you up-to-date with the latest research from leading experts Includes communications and case studies
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Silicon Sensors and Actuators

Table 3.2 Properties of LPCVD silicon nitride Standard Si3 N4 Low stress Si3N4 Crystallographic phase Amorphous DCS/NH3 gas ratio 1:3.5 >1:3.5 Residual stress +1 GPa From −200 MPa to +1 GPa Max thickness >3.0 μm Etch rate in HF 40%, ...

Author: Benedetto Vigna

Publisher: Springer Nature

ISBN: 9783030801359

Category: Technology & Engineering

Page: 997

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This book thoroughly reviews the present knowledge on silicon micromechanical transducers and addresses emerging and future technology challenges. Readers will acquire a solid theoretical and practical background that will allow them to analyze the key performance aspects of devices, critically judge a fabrication process, and then conceive and design new ones for future applications. Envisioning a future complex versatile microsystem, the authors take inspiration from Richard Feynman’s visionary talk “There is Plenty of Room at the Bottom” to propose that the time has come to see silicon sensors as part of a “Feynman Roadmap” instead of the “More-than-Moore” technology roadmap. The sharing of the author’s industrially proven track record of development, design, and manufacturing, along with their visionary approach to the technology, will allow readers to jump ahead in their understanding of the core of the topic in a very effective way. Students, researchers, engineers, and technologists involved in silicon-based sensor and actuator research and development will find a wealth of useful and groundbreaking information in this book.
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20th Annual Conference on Composites Advanced Ceramics Materials and Structures A

whisker-reinforced silicon nitride, Garrett Ceramic Components) [8] and NCX 34 silicon nitride (Norton Co., MA) [7]. The basic physical and mechanical properties of the materials are shown in Table 1. The dynamic fatigue testing was ...

Author: John B. Wachtman

Publisher: John Wiley & Sons

ISBN: 9780470316399

Category: Technology & Engineering

Page: 501

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This volume is part of the Ceramic Engineering and Science Proceeding (CESP) series. This series contains a collection of papers dealing with issues in both traditional ceramics (i.e., glass, whitewares, refractories, and porcelain enamel) and advanced ceramics. Topics covered in the area of advanced ceramic include bioceramics, nanomaterials, composites, solid oxide fuel cells, mechanical properties and structural design, advanced ceramic coatings, ceramic armor, porous ceramics, and more.
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Plasma Deposited Thin Films

63.71 the sodium chloride into the silicon nitride for 16 to 20 hr at 550 to 600 ° C , and counting the radioactive 22Na as the silicon nitride is etched . Less than 1 % of the surface sodium chloride diffuses more than 100 Capacitance ...

Author: Mort

Publisher: CRC Press

ISBN: 9781351084260

Category: Technology & Engineering

Page: 253

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In Summary, the objective of this book is to present in one volume a review of the plasma deposition process and the present understanding of the most important and widely used plasma deposited thin film materials, devices and their applications.
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